Closed tender · Germany · Contract notice
Deposition Tool 8 Inch
Lehrstuhl für Technische Physik E23, TUM
Lehrstuhl für Technische Physik E23, TUM in Germany invited bids for “Deposition Tool 8 Inch”. Bids closed on 5 October 2026.
The work
UHV cluster System for the fabrication of superconducting circuits on 8 inch wafers
- UHV conditions
- HV load-lock chamber
- central handling chamber
- UHV chamber for evaporation of Al thin films
- UHV chamber for sputtering of superconductors
- UHV chamber for oxidation
- UHV chamber for Ar ion milling
- flipping station
What it takes to qualify
Worth a closer look
- Siehe Leistungsbeschreibung
- Siehe Vergabeunterlagen